| 摘要 |
PROBLEM TO BE SOLVED: To provide a freezing chuck cooling system for preventing an increase in an electric power load without raising the indoor temperature by heat generated by a condenser when making cold water by using a refrigerating unit in a freezing chuck cooling system. SOLUTION: The cold water is made by using an absorption refrigerating unit 200 driven by exhaust heat of a factory and combustion heat of fossil fuel. This cold water is introduced into a flow passage 5 of a cooling table 4 placed on a workpiece 1 via a pump 9 and pipes 7 and 8; the cooling table 4 is cooled; and the workpiece 1 is fixed by freezing a freezing mixture 3 between the workpiece 1 and the cooling table 4. COPYRIGHT: (C)2005,JPO&NCIPI
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