| 摘要 |
PROBLEM TO BE SOLVED: To enable a device for evaporating a material mainly in a vacuum, to inhibit a substance produced by decomposition of a material from contaminating a product, and thereby to manufacture a product having high reliability. SOLUTION: This evaporation method comprises heating a crucible 2 having a raw material 1 charged therein with a heater 3, and inserting a mesh member 4 made from metallic mesh between the crucible 2 and the heater 3. Then, the mesh member 4 absorbs and traps a product formed by the decomposition of the raw material 1, and prevents the product from escaping outside the evaporation source. On this occasion, the mesh member 4 is also heated with the heater 3 so as to pass the objective evaporation material through the mesh to reach an upper part without being caught by the mesh member 4 and condensed thereon. The mesh member 4 may be arranged on the evaporation surface side of the raw material 1, but should be configured so as to cover an opening (an outlet for an vaporized substance to go out) of the crucible 2 as completely as possible. COPYRIGHT: (C)2005,JPO&NCIPI
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