Method and arrangement for measuring the coupling capacitance between two conducting lines

摘要

A method and a corresponding arrangement for measuring the coupling capacitance between two interconnect lines exploits the so-called cross-talk effect and keeps an interconnect line at a constant reference voltage. The method and arrangement solve the problem of short-circuit currents that affects the known test structures, and allow a direct measurement of the coupling capacitance between the two interconnect lines. <??>Capacitance measurements may also be used for determining points of interruption of interconnect lines. When a line is interrupted, the measured coupling capacitance is the capacitance of a single conducting branch. The position of points of interruption of an interconnect line is determined by measuring the coupling capacitance of all segments of the line with a second conducting line. <IMAGE>