| 摘要 |
PROBLEM TO BE SOLVED: To provide a clean room capable of preventing, by simple structure, dirt from entering therein in the maintenance of a device installed in the clean room. SOLUTION: In this clean room 10, a bay area 12 and a maintenance area 16 in which a manufacturing device 14 is installed are partitioned by a partition 18. The manufacturing device 14 is passed from the maintenance area 12 to the bay area 12 through the partition 18. A rectangular opening part 42 is formed in the partition 18 positioned in proximity to the upper surface of the manufacturing device 14, and rectangular opening parts 44 and 44 are formed in the partition 18 positioned in proximity to both side faces of the manufacturing device 14. By forming the opening parts 42 and 44 and 44, clean air in the bay area 12 flows from the opening parts 42 and 44 and 44 so as to surround the manufacturing device 14. By this, an air curtain surrounding the manufacturing device 14 is formed, and the entry of dirt into the manufacturing device 14 can be prevented by the air curtain. COPYRIGHT: (C)2005,JPO&NCIPI
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