| 摘要 |
PROBLEM TO BE SOLVED: To provide a method by which quantum dots can be formed at controlled positions with high density and which is suitable for mass production. SOLUTION: After step structures 2 are formed on a compound semiconductor substrate 1 by using lithography, quantum dots 6 are selectively formed only in specific portions on the substrate 1 having the step structures 2 by using a crystal growing technique. When a GaAs substrate is used as the compound semiconductor substrate 1, a small number of quantum dots 6 having diameters of 30-50 nm and heights of 5-15 nm are formed only on tops 3 of the step structures 2 by forming the tops 3 as GaAs (001) faces and inclined side faces 5 of the structures 2 as facet faces other than (001) faces. COPYRIGHT: (C)2005,JPO&NCIPI |
