发明名称 Silica glass crucible
摘要 To provide a silica glass crucible, wherein there are no problems of generating a sinking and buckling when said crucible is used for pulling up silicon single crystal at a high temperature. The silica glass crucible used for pulling up the silicon single crystal, wherein at least an outer surface of a wall part of the crucible is covered with fine grooves having a length of less than 200 mum, a width of less than 30 mum and a depth of from more than 3 mum to less than 30 mum. Preferably, said fine groves are formed by carrying out a sand-blast treatment and a hydrofluoric acid etching and exist on more than 10% of the outer surface of the crucible, and a sliding frictional coefficient of the outer surface of the crucible to a carbon at 1500 degree C. is more than 0.6.
申请公布号 US2004187771(A1) 申请公布日期 2004.09.30
申请号 US20040801683 申请日期 2004.03.17
申请人 JAPAN SUPER QUARTZ CORPORATION 发明人 TSUJI YOSHIYUKI;TSUJIMOTO TOSHIO
分类号 C03B20/00;B24C1/08;C03C15/00;C03C19/00;C30B15/10;C30B29/06;(IPC1-7):B32B1/08 主分类号 C03B20/00
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