METHOD FOR PLATING METAL-CERAMIC COMPOSITE MEMBER, PATTERN MAKING METHOD, WET PROCESSING UNIT, AND METAL-CERAMIC COMPOSITE MEMBER FOR POWER MODULE

摘要

PROBLEM TO BE SOLVED: To enhance an operation efficiency and chop the cost by reducing troubles of masking in plating. SOLUTION: This plating method comprises covering the surface to be bonded of the metal plate 3 of the metal-ceramic composite member 4 integrated with a base 1 on the back face with a frame-shaped masking member 20 having an opening 21 corresponding to a predetermined part to be plated on the metal plate 3, sealing the metal-ceramic composite member 4 by tightly contacting the periphery of the opening 21 with the composite member 4, contacting the metal-ceramic composite member 4 in a state of directing the metal plate 3 downward, with a plating liquid 110 from the bottom side through the masking member 20, and plating the predetermined part to be plated on the metal plate 3. COPYRIGHT: (C)2004,JPO&NCIPI