| 摘要 |
PROBLEM TO BE SOLVED: To provide a position detection sensor capable of protecting an MR sensor against mixed foreign matter by setting a distance between a holding part holding the MR sensor and a scale based on a distance between the MR sensor and the scale and the film thickness of the scale, forming a hard film having external impact resistance on the surface of the MR sensor, and setting the hardness of the surfaces of the holding part and the scale to specified levels. SOLUTION: This position detection device comprises the scale on which position signals are recorded at specified pitches, a detector disposed at a position opposed to and movable relative to the scale and detecting the position signals from the scale, and the holding part holding the detector so that the detector can be moved relative to each other at a specified distance apart from the surface of the scale. A distance between the surfaces of the detector and the scale and the film thickness of the scale are equal to a distance between the surfaces of the holding part and the scale or longer, and the scale is formed of a material with a hardness lower than that of the holding part. COPYRIGHT: (C)2004,JPO&NCIPI
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