PROCESS FOR MANUFACTURING PLASMA DISPLAY PANEL AND SUBSTRATE HOLDER

摘要

A process for manufacturing a plasma display panel, and its substrate holder, capable of suppressing generation of dust particles having an adverse effect on the quality of a film in a film deposition system when the film is deposited on the substrate of the plasma display panel. The film is deposited while holding the substrate (3) and a dummy substrate (35) by a first substrate holder (31) comprising a frame having a holding means consisting of a means for supporting the substrate (3) and the dummy substrate (35) from below and a means for regulating the position of the substrate (3) in the planar direction, and a second substrate holder (32) for holding the first substrate holder (31).