| 摘要 |
The invention is based on an apparatus and a method for scanning specimens (1) using an optical imaging system (3) and a scanning stage (2), images of the specimen (1) being acquired by means of a camera (4), and/or measurements on the specimen (1) being made by means of an optical measurement device (5), at specimen points Xp, Yp. For that purpose, the scanning stage (2) is calibrated by obtaining and storing height values Z at different calibration positions X, Y of the scanning stage (2), and thereby generating a running height profile of the scanning stage (2). For the scanning of specimens (1), the specimen height positions Zp at specimen points Xp, Yp are determined by means of a reference height Zref of the specimen (1) together with the running height profile of the scanning stage (2). While each specimen point Xp, Yp is being traveled to with the scanning stage (2) the relevant specimen height position Zp is already being set, so that running errors of the scanning stage (2) are compensated for and image acquisitions or measurements are possible immediately upon reaching the specimen point Xp, Yp.
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