| 摘要 |
PROBLEM TO BE SOLVED: To collect a contaminating chemical substance from a specimen in a state close to a practical situation by creating an environment close to an actual execution environment with a simple configuration. SOLUTION: A double chamber 4 comprises an inner chamber 2 for accommodating the specimen 1 for dispersing the contaminating chemical substance and a collecting apparatus for collecting the contaminating chemical substance being dispersed from the specimen 1, and an outer chamber 3 for covering the inner chamber 2. In a flow channel, there are an air supply means 8 that comprises a filter 5, an air conditioner 6, and a chemical substance elimination means 7 for supplying purified air to the inner and outer chambers 2, 3; an exhausting means 9 for exhausting air from the double chamber 4; and a bake-out means 10 for heating the inner and outer chambers 2, 3 for purification. COPYRIGHT: (C)2004,JPO
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