| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem wherein, when cleavage patterns caused by various kinds of organic gases are superimposed on one another, interpretation of a mass spectrum of what kinds of an organic gases are emitted becomes extremely difficult. SOLUTION: In order to solve the above problem, this application is related to a technique used for accomplishing high sensitivity to the extent hardly causing the cleavage pattern of the mass spectrum caused by a low ionization voltage, and capable of analyzing a concentration below 1 ppm when a quadrupole type mass spectrometer using electron shock for ionization is used in an analysis of a gas constituent flowing in a vacuum vessel from its outside due to leakage or the like. COPYRIGHT: (C)2004,JPO |
