| 摘要 |
PROBLEM TO BE SOLVED: To provide a carrying method for preventing any crease of a thin substrate occurring at a liquid drain-off roll section of an etching machine or the like. SOLUTION: In this method, substrates are carried by disposing guide rolls 7 and 8 with a space of≥1 mm therebetween in a large number of liquid drain-off rolls disposed between liquid spray tanks of an etching machine or the like. COPYRIGHT: (C)2004,JPO
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