| 摘要 |
PROBLEM TO BE SOLVED: To form an indented pattern with a high degree of accuracy on a board of a master carrier for magnetic transcription. SOLUTION: In making a board 31 having an indented pattern on the surface, a pattern complying with the indented pattern is lithographed on a circular board 11 with a resist 12 coated by scanning an electron beam EB. The electron beam EB with a beam diameter smaller than the smallest width of each element constituting the pattern is made to reciprocate and oscillate at a constant amplitude in a direction crossing the circumferential direction of the circular board 11. Further, by rotating the circular board 11 in one direction A, the electron beam EB is scanned on the circular board 11 from Y1, Y2, Y3 to Y8 to lithograph a top-face shape 12a of each element. COPYRIGHT: (C)2004,JPO
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