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发明名称
Optical element with alignment mark, and optical system having such optical element
摘要
申请公布号
EP1001301(B1)
申请公布日期
2004.06.09
申请号
EP19990308877
申请日期
1999.11.08
申请人
CANON KABUSHIKI KAISHA
发明人
TSUJI, TOSHIHIKO
分类号
G02B5/18;G02B7/00;G02B27/62;(IPC1-7):G02B27/32
主分类号
G02B5/18
代理机构
代理人
主权项
地址
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