发明名称 |
Integrated circuit having reduced soft errors and reduced penetration of alkali impurities into the substrate |
摘要 |
A semiconductor device wherein a coating film which is made of a polyimide resin or a polyimide isoindoloquinazolinedione resin and which is at least 10 mum thick is disposed on at least an active region of a semiconductor substrate, and the resultant semiconductor substrate is encapsulated in a ceramic package. The semiconductor device has troubles relieved conspicuously, the troubles being ascribable to alpha-rays which come flying from impurities contained in the material of the package. |
申请公布号 |
US6747339(B1) |
申请公布日期 |
2004.06.08 |
申请号 |
US19940362293 |
申请日期 |
1994.12.22 |
申请人 |
HITACHI, LTD. |
发明人 |
MUKAI KIICHIRO;SAIKI ATSUSHI;HARADA SEIKI |
分类号 |
H01L21/312;H01L23/057;H01L23/10;H01L23/29;H01L23/31;H01L23/556;(IPC1-7):H01L23/58;H01L23/06;H01L23/04;H01L29/40 |
主分类号 |
H01L21/312 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|