PREPARATION METHOD OF CONDUCTIVE THIN FILM

摘要

PURPOSE: A preparation method of a conductive thin film is provided to improve the specific resistance of the obtained thin film effectively without need for troublesome processes such as maintaining a high vacuum condition strictly and heating a substrate. CONSTITUTION: The preparation method of the conductive thin film comprises the steps of: forming a nucleation induction layer to induce the homogeneous nucleation for growth of the grains constituting a conductive layer on a substrate; generating nuclei homogeneously by supplying material constituting the conductive layer on the nucleation induction layer; and forming a conductive layer by supplying a material constituting the conductive layer on the nucleation induction layer and the nuclei and growing grains, wherein the material constituting the conductive layer has the composition different from the material used in the step for forming nucleation induction layer.