SETTING TIME MEASURING METHOD OF WAFER BURN-IN SYSTEM AND APPARATUS FOR THE SAME

摘要

PURPOSE: A setting time measuring method of a wafer burn-in system and an apparatus for the same are provided to be capable of measuring the setting time of a VS(Voltage Supply) board using the wafer burn-in system itself without using additional measuring equipment. CONSTITUTION: A setting time measuring apparatus of a wafer burn-in system is provided with a voltage supply part(331) for transforming a DC(Direct Current) voltage into an analog voltage, a VS board(340) for amplifying and outputting the analog voltage into a high voltage signal, and a DC board(350) for measuring the magnitude of the high voltage signal. The setting time measuring apparatus further includes an A/D(Analog/Digital) converter(332) for converting the voltage rise duration of the high voltage signal into digital type pulse signals by using sampling and a computer(100) for outputting setting time error by comparing the number of pulse signals with a reference number.