| 摘要 |
PROBLEM TO BE SOLVED: To enable vibrations to be less conducted from one of two structures, which are separately supported and connected together by a connecting member to form a closed space, to the other and vice versa through the connecting member. SOLUTION: The connecting member 37 connects a purge chamber, which surrounds an optical path of exposure light so as to isolate it from its surroundings, to another structure and also keeps the purge chamber airtight. The connecting member 37 has a cylindrical shape which is corrugated in a cross section perpendicular to its axis. COPYRIGHT: (C)2004,JPO
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