| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a manufacturing method for a field emission element of a carbon material having excellent conductivity, thermal conductivity and corrosion resistance, and a uniform field emission property. <P>SOLUTION: This field emission element is provided with a graphite sheet 102 fixed on an insulating substrate 105 by an adhesive layer 106. As an electron emission area, there are a projecting structure 103 with a size of 2 micrometers to 600 micrometers and height of 40 micrometers or less and nanoparticles 104 with particle diameters of 5 nm to 1000 nm exists on the surface of a graphite sheet 102. A conductive gate layer 108 is provided through the graphite sheet and an insulating layer 107. With this arrangement, a field emission element made of a carbon material and having uniform field emission property, excellent conductivity, thermal conductivity and corrosion resistance can be obtained. <P>COPYRIGHT: (C)2004,JPO</p> |
