| 摘要 |
PROBLEM TO BE SOLVED: To provide a sensor-integrated linear guide enabling the miniaturization of a device in relation to the precise positioning technique of a linear guide having a gas bearing for retaining a sleeve that is a movable body on a track member in no contact. SOLUTION: This sensor-integrated linear guide has the track member having at least a pair of bearing parts and the sleeve fitted to the track member. A lubricating gas is blown between the bearing part and the sleeve to form a prescribed clearance, so that the sleeve is movable by gas lubrication. A position sensor is integrally assembled between the bearing parts. COPYRIGHT: (C)2004,JPO
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