| 摘要 |
PROBLEM TO BE SOLVED: To provide a clean room air-conditioning facility capable of preventing the occurrence of oblique flow in a clean room with simple structure without increasing an unnecessary space. SOLUTION: This clean room air-conditioning facility 1 is divided in four rooms which are a ceiling chamber 2, a clean room 3, an underfloor chamber 4 and a return chamber 5. The ceiling chamber 2 is provided with fan filter units 6 and filters 7, and a lower part of the clean room 3 is provided with a grating plate 8 of lattice shape. A lower part of the grating plate 8 is provided with a plurality of venting plates 12-14. Each venting plate is provided with opening parts 12a-14a of prescribed size, and the opening parts are arranged to be on the center side as they go downward. COPYRIGHT: (C)2004,JPO
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