| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for processing mask data capable of efficiently decreasing the data volume of mask data, and to provide a mask writing apparatus capable of writing a mask by taking in data which are compressed with a function description. <P>SOLUTION: A plurality of forms and arrangements of drawing written on a mask are expressed by a function definition and a function call to process data. The mask writing system comprises a data processing function part for generating pattern data by taking in the data described by those functions, and a writing function part for writing on the mask in accordance with the pattern data. <P>COPYRIGHT: (C)2004,JPO</p> |
