| 摘要 |
PURPOSE: A method and a device for conveying substrates are provided to resolve the lack of cassettes for conveying reject substrates and reduce the time required for conveying the reject substrates. CONSTITUTION: A device for conveying substrates includes a stocker(110) and a substrate conveying part(120) adjacent to the stocker. The stocker is loaded with a plurality of the first cassettes(115) receiving substrates for which all steps are carried out, and the first robot arm part(112) loading and unloading the first cassettes to the substrate conveying part by reading bar codes of the first cassettes. The substrate conveying part includes a substrate loading part(FROM), the first and second substrate conveying parts(T01,T02), and the second robot arm part(122). The substrate loading part loads the first cassettes and unloads the same after conveying substrates from the first cassettes. The first substrate conveying part loads the second cassettes(126) receiving substrates for reuse from the first cassettes. The second substrate conveying part loads disposal cassettes(128) receiving substrates for disposal from the first cassettes on the substrate loading part. The second robot arm part transmits the reuse and disposal substrates from the first and second substrate conveying parts into the cassettes. |
