| 摘要 |
PROBLEM TO BE SOLVED: To provide a disk transfer device equipped with an automatic centering device capable of preventing the generation of cracks or chips of the center hole by automatically aligning the center hole of a disk with a centering pin even when there is a displacement between the centering pin and the center hole of the disk. SOLUTION: This device is provided with a centering unit which places a fixed side magnet 6 and a movable side magnet 7 in opposing attracting states, disposes a steel ball 9 between the fixed side magnet 6 and the movable side magnet 7, moves relatively to the fixed side magnet 6 upon reception of an external force on the movable side magnet 7, and uses the return of the movable side magnet 7 to its initial attracting position upon removal of the external force from the movable side magnet 7, and a disk suction head 13 disposed on the movable side magnet 7. When a disk 17 is sucked by the movable side magnet 7 to be conveyed, the centering hole 17a of the disk is automatically aligned with the centering pin 19 of a disk table 18. COPYRIGHT: (C)2004,JPO
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