| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for forming a structure having small continuous pores or a film on a substrate as an electrode of a photoelectric conversion element. <P>SOLUTION: Brittle material superfine particles having an average superfine particle diameter of less than 0.1 μm are calcinated. A part of the brittle material superfine particles are bound so as to form porous fine particles. Next, the porous fine particles are dispersed in a gas to form an aerosol. The aerosol is sparyed into the substrate and collides with the porous fine particles, thereby forming the porous structure (film) having the porous fine particles bound to each other and desposited, on the substrate. <P>COPYRIGHT: (C)2004,JPO |
