发明名称 Semiconductor device.
摘要 In a semiconductor device, re-wiring is provided on a circuit element formation region of a semiconductor substrate. A columnar electrode for connection with a circuit board is provided on the rewiring. A first insulating film is provided over the semiconductor substrate excluding a connection pad, and a ground potential layer connected to a ground potential is provided on an upper surface of the first insulating film. A re-wiring is provided over the ground potential layer with a second insulating film interposed. The ground potential layer serves as a barrier layer for preventing crosstalk between the re-wiring and circuit element formation region. A thin-film circuit element is provided on the second insulating film, and a second ground potential layer is provided as a second barrier layer over the thin-film circuit element with an insulating film interposed. Re-wiring is provided over the second ground potential layer.
申请公布号 HK1029443(A1) 申请公布日期 2004.02.04
申请号 HK20010100207 申请日期 2001.01.09
申请人 CASIO COMPUTER CO., LTD. 发明人 YUTAKA AOKI;ICHIRO MIHARA;TAKESHI WAKABAYASHI;KATSUMI WATANABE
分类号 H01L21/3205;H01L;H01L21/60;H01L21/822;H01L23/50;H01L23/52;H01L23/522;H01L27/00;H01L27/04;H01L29/40;H01L31/00;(IPC1-7):H01L 主分类号 H01L21/3205
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