发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要 PURPOSE: A semiconductor device and a method for manufacturing the same are provided to improve operating speed by enhancing the contact area between a bitline contact and a landing plug. CONSTITUTION: A field oxide layer(32) is formed at a semiconductor substrate(31) to define an active region. After forming the first interlayer dielectric(37a) on the resultant structure, a landing plug(38a) is formed to contact the entire region of the active region and portions of the field oxide layer through the first interlayer dielectric. The second interlayer dielectric(39) is formed on the resultant structure. A bitline(41) is formed to contact the field oxide layer through the second interlayer dielectric and the landing plug.
申请公布号 KR20040008642(A) 申请公布日期 2004.01.31
申请号 KR20020042310 申请日期 2002.07.19
申请人 HYNIX SEMICONDUCTOR INC. 发明人 JANG, HEON YONG
分类号 H01L21/28;(IPC1-7):H01L21/28 主分类号 H01L21/28
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