摘要 |
A vacuum gate valve is disclosed the valve body (2) of which is raised or lowered by pneumatic cylinder (30) and piston rod (3). Valve body (2) is moved in the horizontal direction pneumatically by a pressure applying mechanism (4). The pressure applying mechanism comprises either a bellows (4), a plurality of bellows units (40a) or an air bag (42). Compressed air is fed to pressure applying mechanism (4) through passage (53) within piston rod (32) and through passage (51) within pneumatic transmission block (50). The vacuum gate valve further includes a horizontal guide mechanism (7) for guiding valve body (2). The horizontal guide mechanism (7) comprises a horizontal guide plate (70). Thus the air-tightness of the valve can be improved, the structure of the valve can be simplified and the guiding operation can be improved, thereby improving the reliability of operation. |