发明名称 TORSIONAL RESONANCE MODE PROBE-BASED INSTRUMENT AND METHOD
摘要 An apparatus and method of operating a probe-based instrument in a torsional mode. The method includes providing a probe (71) having a cantilever (74) defining a longitudinal axis and supporting a tip (76). In operation, the method torsionally oscillates the probe generally about the longitudinal axis at a resonance. In addition, the method changes a separation distance between the tip and a surface (80) of a sample (78) so the tip interacts with the surface during data acquisition. By detecting a change in the torsional oscillation of the cantilever in response to the interaction between the tip and the surface, forces, including shear forces and shear force gradients, between the tip and the surface can be measured to determine sub-nanometer features.
申请公布号 WO2004005845(A2) 申请公布日期 2004.01.15
申请号 WO2003US20880 申请日期 2003.07.02
申请人 VEECO INSTRUMENTS, INC. 发明人 SU, CHANMIN;BABCOCK, KENNETH, L.;HUANG, LIN
分类号 G01Q10/06;G01Q60/26 主分类号 G01Q10/06
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