| 摘要 |
PROBLEM TO BE SOLVED: To provide a clean room that can ensure high cleanliness by supplying clean air at small ventilation amount. SOLUTION: This clean room 10 comprises partition walls 14 and 14 opposing each other across a working room 18, partition walls 14 and 14 being respectively provided with nozzles 20 and 20. Each nozzle 20 is connected to a fan filter unit (FFU) 26, and clean air discharged from the FFU blows off at low speed of 2 to 3 m/s. The clean air blew off from the nozzle 20 clashes with clean air blew off from an opposing nozzle. By this way, a clean zone is formed, thereby keeping high cleanliness in a central area of the working room 18. COPYRIGHT: (C)2004,JPO
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