| 摘要 |
PURPOSE: A temperature control apparatus of the heat block for a semiconductor device is provided to be capable of adequately controlling the temperature of the heat block for stably carrying out a cleaning process at a window. CONSTITUTION: A temperature control apparatus of the heat block for a semiconductor device is provided with a heater for being heated by a power supply, a heat block(10) connected to the heater for being heated by the heat transmitted from the heater, and a switching terminal part(40) for switching the supply voltage applied to the heater. The switching terminal part includes a bimetal(41) made of two metal parts having a different thermal expansivity, a connection terminal(42) for contacting each end portion of the bimetal, and a supporting part(43) protruded from the heat block as one piece for stably loading one end of the bimetal.
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