THIN FILM TRANSISTOR APPARATUS AND MANUFACTURING METHOD THEREOF, THIN FILM TRANSISTOR SUBSTRATE PROVIDED WITH THE SAME, AND DISPLAY APPARATUS

摘要

PURPOSE: To provide a TFT apparatus having excellent characteristics and high reliability, a manufacturing method thereof, a TFT substrate provided with the same, and a display apparatus. CONSTITUTION: A metal thin film is formed on a gate insulation film 4, patterning is applied to a metal thin film to remove the metal thin film on a semiconductor layer 3b to form a source and drain region 301 of an n-type TFT, phosphorus ions are injected by using the metal thin film 5b subjected to the patterning for a mask to form the source and drain region 301, patterning is further applied to the metal thin film 5b subjected to the patterning to form a gate electrode 52 of the n-type TFT, and phosphorus ions are injected by using the gate electrode 52 for a mask to form an LDD region 306 between the source and drain region 301 and a channel region 307.