发明名称 ACID ETCHING MIXTURE HAVING REDUCED WATER CONTENT
摘要 <p>Acid etching mixtures having water content, reduced by the addition of fluorosulfonic acid. The preparation and the use of said acid etching mixtures, particularly in etching silicon, are also disclosed.</p>
申请公布号 WO2003107400(P1) 申请公布日期 2003.12.24
申请号 US2003019079 申请日期 2003.06.18
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