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发明名称
METHOD FOR PASSIVATING SEMICONDUCTOR SUBSTRATE
摘要
申请公布号
KR20030091733(A)
申请公布日期
2003.12.03
申请号
KR20030032409
申请日期
2003.05.21
申请人
发明人
分类号
C23C16/42;H01L21/205;C23C16/34;C23C16/513;H01L21/318;H01L31/04
主分类号
C23C16/42
代理机构
代理人
主权项
地址
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