| 摘要 |
It is an object of this invention to cancel a moment reaction force generated upon driving an object and reduce its effect. A driving apparatus of this invention includes the first linear motor which drives an object (e.g., an X-Y slider) in the X direction, the second linear motor which drives the object in the Y direction, and a controller which controls the first and second linear motors. The first and second linear motors have the first and second reaction force counters (24,25,124,125), respectively, which move upon receipt of a reaction force generated upon driving the object. In moving the object standing at a point A to a point B and stopping the object, the controller controls the first and second linear motors such that the object moves on a straight line connecting the point A and the point B. <IMAGE>
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