| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To manufacture high-pressure extrapure water while restricting quantity of particulates in such a range as to cause no trouble in cleaning silicon substrates and glass substrates. <P>SOLUTION: This device is provided with a pressure transmitting part to transmit pressure of liquid pressurized by a high pressure pump to extrapure water refined in an extrapure water refining device, a suction side check valve provided in an extrapure water feed tube to feed extrapure water into the pressure transmitting part, and a discharge side check valve provided in high pressure extrapure water discharge piping to discharge extrapure water pressurized in the pressure transmitting part. As the discharge side check valve 52a or 52b, the one comprising a valve element 16 to get in surface-contact with a valve seat 14 is used, and at least either of the valve element 16 and the valve seat 14 is composed of high polymer material. <P>COPYRIGHT: (C)2004,JPO</p> |
