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发明名称	PLASMA PROCESSING APPARATUS
摘要
申请公布号	KR20030079948(A)	申请公布日期	2003.10.10
申请号	KR20037009324	申请日期	2003.07.11
申请人		发明人
分类号	H01L21/00;H05H1/46;H01J37/32;H01L21/3065	主分类号	H01L21/00
代理机构		代理人
主权项
地址

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