| 发明名称 |
Method and apparatus for compensation of time-varying optical properties of gas in interferometry |
| 摘要 |
Methods and systems for compensating a measured optical path length for time-varying optical properties of gas in an interferometer's measurement beam path based on a measurement of the beam propagation direction are disclosed.
|
| 申请公布号 |
US2003186134(A1) |
申请公布日期 |
2003.10.02 |
| 申请号 |
US20030350522 |
申请日期 |
2003.01.24 |
| 申请人 |
HILL HENRY A. |
发明人 |
HILL HENRY A. |
| 分类号 |
G01B9/02;G01B11/00;G03F7/20;H01L21/027;(IPC1-7):G03F1/00;G21K5/00;G21G5/00;G03B27/52;G01B11/02 |
主分类号 |
G01B9/02 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
