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发明名称	ION IMPLANTATION SYSTEM AND CONTROL METHOD
摘要
申请公布号	EP1347804(A1)	申请公布日期	2003.10.01
申请号	EP20010944435	申请日期	2001.06.12
申请人	SEMEQUIP, INC.	发明人	HORSKY, THOMAS, N.;COHEN, BRIAN, C.;KRULL, WADE, A.;SACCO, GEORGE, P., JR.
分类号	H01J27/20;H01J37/08;H01J37/317;H01J49/14;H01L21/265;(IPC1-7):A61N5/00;H01J7/24	主分类号	H01J27/20
代理机构		代理人
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