VERTICAL CAVITY SURFACE EMITTING LASER

摘要

PURPOSE: A vertical cavity surface emitting laser(VCSEL) is provided to control aluminum composition of an oxidation possible layer accurately and easily, and form the thickness of an oxide influencing on an oxidation rate. CONSTITUTION: The first reflector layer(102) is formed on a semiconductor substrate(100) by stacking two semiconductor epi layers having a high refractive index and a low refractive index, and is doped with an impurity. An active layer(104) is formed on the first reflector layer and generates a light. The first current insulation region(112) is formed by oxidizing a region of the first and the second oxidation possible layer(106,108) to form an open aperture, after stacking the first and the second oxidation possible layer on the active layer. The second reflector layer(110) is doped with an impurity on the second oxidation possible layer and is formed by stacking two semiconductor epi layers having a high refractive index and a low refractive index. The second current insulation region(114) is formed on the second reflector layer except a position corresponding to the first open aperture. A bottom electrode(116) is formed on a bottom of the semiconductor substrate, and a top electrode(118) is formed on the second reflector layer.