OPTICAL MEASUREMENTS OF PATTERNED STRUCTURES,申请号AU20030209647-传众专利搜索

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发明名称	OPTICAL MEASUREMENTS OF PATTERNED STRUCTURES
摘要
申请公布号	AU2003209647(A1)	申请公布日期	2003.09.16
申请号	AU20030209647	申请日期	2003.03.04
申请人	NOVA MEASURING INSTRUMENTS LTD.	发明人	SHAHAR GOV;BOAZ BRILL
分类号	G01B11/30;G03F7/20	主分类号	G01B11/30
代理机构		代理人
主权项
地址

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