| 摘要 |
PROBLEM TO BE SOLVED: To simplify electrode structure for an ion source, to reduce its size, and to selectively remove an unnecessary ionic species. SOLUTION: This mass separation ion filter 20 has the first magnet 22 for forming the first magnetic field orthogonal to a beam axis 21 of an ion beam, the second magnet 23 for forming the second magnetic field arranged in series to the first magnetic field along the beam axis, orthogonal to the beam axis, parallel to the first magnetic field, and reverse-directional thereto, and a collimator wall 26 formed within the first and second magnetic field to form a moving route 25 along the second curved route 23a deflected to a direction reverse to the first magnetic field by the second magnetic field, from the first, curved route 22a deflected by the first magnetic field. A desired mass of ion is guided to the direction same to the beam axis, passing the incident ion through the route curved reverse-directionally by the first and second magnetic fields, using the mass separation filter. COPYRIGHT: (C)2003,JPO
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