| 摘要 |
PROBLEM TO BE SOLVED: To provide a developer supply system capable of highly accurately detecting the alkali concentration and the dissolved resin concentration in developer recovered from the developing process of a liquid crystal substrate and a printed board, and capable of supplying the developer of more accurately adjusted concentration to the developing process. SOLUTION: The developer supply system is provided with a supply tank (1) for storing the developer to be supplied, a recovered liquid supply mechanism (2) for feeding the used developer to the supply tank (1), a raw liquid supply mechanism (3) for feeding a new developer raw liquid to the supply tank, and a specific concentration meter (5) for detecting the alkali concentration and the resin concentration in the used developer at a fixed temperature based on an ultrasonic wave transmission speed and an electromagnetic conductivity. The feeding of the developer raw liquid by the raw liquid supply mechanism (3) is controlled based on the concentration detected by the concentration meter (5). COPYRIGHT: (C)2003,JPO |
