发明名称 Flowable chips and methods for the preparation and use of same, and apparatus for use in the methods
摘要 A method for recharging a crucible with polycrystalline silicon comprises adding flowable chips to a crucible used in a Czochralski-type process. Flowable chips are polycrystalline silicon particles made from polycrystalline silicon prepared by a chemical vapor deposition process, and flowable chips have a controlled particle size distribution, generally nonspherical morphology, low levels of bulk impurities, and low levels of surface impurities. Flowable chips can be added to the crucible using conventional feeder equipment, such as vibration feeder systems and canister feeder systems.
申请公布号 US2003159647(A1) 申请公布日期 2003.08.28
申请号 US20020298129 申请日期 2002.11.14
申请人 ARVIDSON ARVID NEIL;HORSTMAN TERENCE LEE;MOLNAR MICHAEL JOHN;SCHMIDT CHRIS TIM;SPENCER ROGER DALE 发明人 ARVIDSON ARVID NEIL;HORSTMAN TERENCE LEE;MOLNAR MICHAEL JOHN;SCHMIDT CHRIS TIM;SPENCER ROGER DALE
分类号 C30B15/00;C30B15/02;(IPC1-7):C30B15/00;C30B21/06;C30B27/02;C30B28/10;C30B30/04 主分类号 C30B15/00
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