A WAFER CARRIER ASSEMBLY FOR CHEM-MECH POLISHING

摘要

A WATER CARRIER ASSEMBLY (100-110) INCLUDING A SUBASSEMBLY (120-124) FOR IN-SITU NONDESTRUCTIVE PAD CONDITIONING, CHARACTERIZED BY CONTINUOUSLY CLEANSING THE PAD SURFACE (140) WITH AN ENERGIZED FLUID. THE FLUID MAY BE ABRASIVE IN NATURE, SUCH AS A SLURRY, OR NON-ABRASIVE, SUCH AS DEIONIZED (DI) WATER. IN ADDITION, THE FLUID MAY BE OF A TYPE KNOWN TO ASSIST IN REMOVING SLURRY AND/OR RESIDUAL MATERIALS FROM A PAD SURFACE AND FOLLOWED BY A D1 WATER RINSE. THE CHEMICAL MAY BE EITHER LIQUID OR GAS.