EVAPORATION BOAT FOR SUBSTRATE COATING APPARATUS

摘要

PROBLEM TO BE SOLVED: To form an evaporation boat for enabling melting without the droplet of a supplied wire rod without requiring wider width compared with a general- purpose evaporation boat. SOLUTION: The evaporation boat (1) has a heating surface (4) positioned more highly than the bottom (6) of a pool (2) for melting the wire rod (5). This heating surface has a temperature lower than that of the bottom (6) of the pool (2) on the basis of the shape of the evaporation boat (1) or a material in the region of the heating surface (4). The evaporation boat (1) is formed so that a metal melted on the heating surface (4) is discharged to the pool (2). COPYRIGHT: (C)2003,JPO