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发明名称
PHASE-SHIFTING INTERFEROMETRY METHOD AND SYSTEM
摘要
申请公布号
AU2002353038(A1)
申请公布日期
2003.06.23
申请号
AU20020353038
申请日期
2002.12.04
申请人
ZYGO CORPORATION
发明人
LESLIE, L. DECK
分类号
G01B9/02;G01B11/02;G01B11/06;G01B11/24;G01J3/45;G01J9/02;G01J9/04;G01M11/00;G01N21/19;G01N21/21;G01N21/45;G01N21/958
主分类号
G01B9/02
代理机构
代理人
主权项
地址
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