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发明名称
KORROSIONSBESTÄNDIGE BESCHICHTUNG
摘要
申请公布号
DE69907969(D1)
申请公布日期
2003.06.18
申请号
DE19996007969
申请日期
1999.10.29
申请人
APPLIED MATERIALS, INC.
发明人
BANG, WON;CHEN, CHEN-AN;VENKATARAMAN, SHANKAR;BHATNAGAR, AJAY
分类号
C23C14/06;C23C14/58;C23C16/44;H01J37/32;(IPC1-7):C23C16/44
主分类号
C23C14/06
代理机构
代理人
主权项
地址
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