摘要 |
PROBLEM TO BE SOLVED: To provide an optical member for ultraviolet and vacuum ultraviolet regions, which exhibits high durability even when it is irradiated with high energy light. SOLUTION: The lithium calcium aluminum fluoride single crystal expressed by the formula: Li<SB>1-x-y</SB>Be<SB>x</SB>Mg<SB>y</SB>CaAlF<SB>6+x+y</SB>(wherein, 0.0005<x+y<0.020), in which either or both of Be<SP>2+</SP>and Mg<SP>2+</SP>are introduced to Li<SP>+</SP>site as doping elements for lithium calcium aluminum fluoride single crystal by an amount given by following relation: 0.05 mol%<BeF<SB>2</SB>+MgF<SB>2</SB><2.0 mol%, is provided as the optical member for the ultraviolet and vacuum ultraviolet regions. COPYRIGHT: (C)2003,JPO
|